Electronic GradeTetramethylammonium Hydroxide
25%、20%、 2.380% ( Developer TMAH )
| C.A.S.NO. |
75-59-2 |
Freezing point, ℃ |
<-25.0 |
| Formula |
(CH3)4NOH |
Viscosity 25℃,cst |
2.8 |
| MW |
91.15 |
Specific gravity@60 ℉ |
1.022 |
| Phase |
Liquid |
Flash point ℉ |
>200 |
| Boiling point,℃ |
100.0 |
pH |
>13 |
| Item |
Unit |
RJ-25 (MAX) |
RJ-20 (MAX) |
RJ-2.380 (MAX) |
| Assay |
% |
24.90～25.10 |
19.90～20.10 |
2.377～2.383 |
| Color |
Hazen |
5 |
5 |
5 |
| CO32-(Carbonate) |
ppm |
100 |
100 |
10 |
| Cl- (Chloride ) |
ppm |
0.1 |
0.1 |
0.1 |
| CH3OH (Methanol) |
ppm |
40 |
40 |
10 |
| Li (Lithium) |
ppb |
5 |
5 |
1 |
| Na (Sodium) |
ppb |
10 |
10 |
1 |
| Mg (Magnesium) |
ppb |
5 |
5 |
1 |
| Al (Aluminium) |
ppb |
10 |
10 |
1 |
| K (Potassium) |
ppb |
10 |
10 |
1 |
| Ca (Calcium) |
ppb |
10 |
10 |
1 |
| Cr (Chromium) |
ppb |
5 |
5 |
1 |
| Mn (Manganese) |
ppb |
5 |
5 |
1 |
| Fe (Iron) |
ppb |
5 |
5 |
1 |
| Ni (Nickel) |
ppb |
5 |
5 |
1 |
| Co (Cobalt) |
ppb |
5 |
5 |
1 |
| Cu (Copper) |
ppb |
5 |
5 |
1 |
| Zn (Zinc) |
ppb |
5 |
5 |
1 |
| Mo (Molybdenum) |
ppb |
5 |
5 |
1 |
| Cd (Cadmium) |
ppb |
5 |
5 |
1 |
| Pb (Lead) |
ppb |
5 |
5 |
1 |
| Ag (Silver) |
ppb |
5 |
5 |
1 |
| Particle ≥0.5um |
Ea/ml |
100 |
100 |
100 |
| Usage |
widely used in electronic industry , especially as positive resister developer ,silicon wafer wet etchant and super clean solution for CMP process. |
| Storage |
kept in sealed container in shade |
| Package |
1000Kg IBC drum |
| Shipping Information |
Danger class：8 UN 1835 |
Add：Haixi Road No.8,International Chemical Industrial Park,Zhenjiang New District,Jiangsu Province.
Contact：MISS Hu
TEL：86511-83361155
Fax：86511-83361155
Mobile：18261976115
Mail：[email protected]
Web：www.opedu.com.cn |
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